AR ION-BEAM ETCHING CHARACTERISTICS AND DAMAGE PRODUCTION IN INP

被引：49

作者：

WADA, O

机构：

[1] Fukitsu Lab ltd, Atsugi, Jpn, Fukitsu Lab ltd, Atsugi, Jpn

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1984年 / 17卷 / 12期

关键词：

D O I：

10.1088/0022-3727/17/12/011

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

15

引用

收藏

页码：2429 / 2437

页数：9

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