ION MIXING AND RECOIL IMPLANTATION SIMULATIONS BY MEANS OF TRIDYN

被引:61
作者
MOLLER, W
ECKSTEIN, W
机构
关键词
D O I
10.1016/0168-583X(85)90448-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:645 / 649
页数:5
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