CORRELATION BETWEEN CHEMICAL AND ELECTRICAL PROFILES IN SI+, SE+ AND S+ IMPLANTED BULK AND EPITAXIAL GAAS

被引：11

作者：

KANBER, H

FENG, M

EU, VK

RUSH, RC

HENDERSON, WB

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1982年 / 11卷 / 06期

关键词：

D O I：

10.1007/BF02658918

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1083 / 1114

页数：32

共 38 条

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