THE ELECTRICAL CHARACTERISTICS OF ION-IMPLANTED COMPOUND SEMICONDUCTORS

[1] ADACHI S, 1976, JPN J APPL PHYS, V15, P1513, DOI 10.1143/JJAP.15.1513

[2] AKIMCHENKO IP, 1975, SOV PHYS SEMICOND+, V9, P19

[3] EFFECT OF DUAL IMPLANTS INTO GAAS [J]. ELECTRONICS LETTERS, 1975, 11 (15) : 314 - 315

[4] LOW-TEMPERATURE ANNEALING BEHAVIOR OF GAAS IMPLANTED WITH BE [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 178 - 180

[5] CAPLESS ANNEALING OF ION-IMPLANTED GALLIUM-ARSENIDE BY A MELT-CONTROLLED AMBIENT TECHNIQUE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (04) : 925 - 927

[6] PHOSPHOROUS-ION-IMPLANTED CDS [J]. APPLIED PHYSICS LETTERS, 1968, 12 (10) : 334 - &

[7] AOKI K, 1977, ION IMPLANTATION SEM, P123

[8] ARKADEVA EN, 1975, SOV PHYS SEMICOND+, V9, P563

[9] P-N-JUNCTION DIODES IN INP AND IN1-XGAXASYP1-Y FABRICATED BY BERYLLIUM-ION IMPLANTATION [J]. APPLIED PHYSICS LETTERS, 1979, 34 (03) : 229 - 231

[10] RADIATION-ENHANCED DIFFUSION OF ION-IMPLANTED BISMUTH IN CADMIUM-SULFIDE [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (17) : 2034 - 2042

[1] ADACHI S, 1976, JPN J APPL PHYS, V15, P1513, DOI 10.1143/JJAP.15.1513

[2] AKIMCHENKO IP, 1975, SOV PHYS SEMICOND+, V9, P19

[3] EFFECT OF DUAL IMPLANTS INTO GAAS [J]. ELECTRONICS LETTERS, 1975, 11 (15) : 314 - 315

[4] LOW-TEMPERATURE ANNEALING BEHAVIOR OF GAAS IMPLANTED WITH BE [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 178 - 180

[5] CAPLESS ANNEALING OF ION-IMPLANTED GALLIUM-ARSENIDE BY A MELT-CONTROLLED AMBIENT TECHNIQUE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (04) : 925 - 927

[6] PHOSPHOROUS-ION-IMPLANTED CDS [J]. APPLIED PHYSICS LETTERS, 1968, 12 (10) : 334 - &

[7] AOKI K, 1977, ION IMPLANTATION SEM, P123

[8] ARKADEVA EN, 1975, SOV PHYS SEMICOND+, V9, P563

[9] P-N-JUNCTION DIODES IN INP AND IN1-XGAXASYP1-Y FABRICATED BY BERYLLIUM-ION IMPLANTATION [J]. APPLIED PHYSICS LETTERS, 1979, 34 (03) : 229 - 231

[10] RADIATION-ENHANCED DIFFUSION OF ION-IMPLANTED BISMUTH IN CADMIUM-SULFIDE [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (17) : 2034 - 2042