PYRAMIDAL PIT FORMATION AT THE AU/GAAS INTERFACE DURING HEAT-TREATMENT

被引:14
作者
PECZ, B [1 ]
JAROLI, E [1 ]
RADNOCZI, G [1 ]
VERESEGYHAZY, R [1 ]
MOJZES, I [1 ]
机构
[1] CENT RES INST PHYS,H-1525 BUDAPEST 114,HUNGARY
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 02期
关键词
D O I
10.1002/pssa.2210940209
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:507 / 513
页数:7
相关论文
共 10 条
[1]  
BARNA A, 1984, 8TH P EUR C EL MICR, V1, P107
[2]   ALLOYING BEHAVIOR OF AU AND AU-GE ON GAAS [J].
GYULAI, J ;
MAYER, JW ;
RODRIGUEZ, V ;
YU, AYC ;
GOPEN, HJ .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (09) :3578-+
[3]  
KANAYA K, 1972, J PHYS D, V5, P42
[4]   ELECTRON-MICROSCOPIC STUDY OF ALLOYING BEHAVIOR OF AU ON GAAS [J].
KUMAR, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (04) :713-716
[5]   ELECTRON-MICROSCOPY STUDIES OF ALLOYING BEHAVIOR OF AU ON GAAS [J].
MAGEE, TJ ;
PENG, J .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 32 (02) :695-700
[6]   VOLATILE COMPONENT LOSS AND CONTACT RESISTANCE OF METALS ON GAAS AND GAP DURING ANNEALING [J].
MOJZES, I ;
SEVESTYEN, T ;
SZIGETHY, D .
SOLID-STATE ELECTRONICS, 1982, 25 (06) :449-&
[7]   INTERFACE REACTION OF GOLD-FILMS WITH N-TYPE GA0.7AL0.3AS AND GAAS [J].
VANDENBERG, JM ;
KINSBRON, E .
THIN SOLID FILMS, 1980, 65 (02) :259-265
[8]   INTERFACIAL REACTIONS BETWEEN GOLD THIN-FILMS AND GAAS SUBSTRATES [J].
YOSHIIE, T ;
BAUER, CL ;
MILNES, AG .
THIN SOLID FILMS, 1984, 111 (02) :149-166
[9]   ORIENTATION RELATIONSHIPS BETWEEN THIN-FILMS OF AU, (100) SUBSTRATES OF GAAS, AND THEIR REACTION-PRODUCTS [J].
YOSHIIE, T ;
BAUER, CL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :554-557
[10]   INSITU X-RAY-DIFFRACTION STUDY OF MELTING IN GOLD CONTACTS TO GALLIUM-ARSENIDE [J].
ZENG, XF ;
CHUNG, DDL .
SOLID-STATE ELECTRONICS, 1984, 27 (04) :339-345