EFFECTS OF PREADSORBED OXYGEN CONTAMINANT ON ADSORPTION OF AL ON SI (111)

被引：3

作者：

BELLINA, JJ ^{[1
]}

机构：

[1] MCDONNELL DOUGLAS CORP,RES LABS,ST LOUIS,MO 63166

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 06期

关键词：

D O I：

10.1116/1.1318696

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1133 / 1140

页数：8

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