EVIDENCE FOR A NEW PASSIVATING INDIUM RICH PHOSPHATE PREPARED BY ULTRAVIOLET OZONE OXIDATION OF INP

被引:28
作者
HOLLINGER, G [1 ]
GALLET, D [1 ]
GENDRY, M [1 ]
BESLAND, MP [1 ]
JOSEPH, J [1 ]
机构
[1] ECOLE CENT LYON,PHYSICOCHIM INTERFACES LAB,CNRS,URA 404,F-69131 ECULLY,FRANCE
关键词
D O I
10.1063/1.106248
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using x-ray photoelectron spectroscopy (XPS), it is demonstrated that noncrystalline thin oxide layers grown on InP by ultraviolet (UV)/ozone oxidation are composed of a single phase of phosphate average composition InP0.5O2.75 which do not exist as crystalline compounds. The ability of nonstoichiometric InP native oxides to passivate InP surfaces is discussed on the basis of these new findings.
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页码:1617 / 1619
页数:3
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