ON-AXIS ENERGY ANALYSIS OF GA-69+, GA-2+, AND GA-2+ IONS EMITTED FROM A GALLIUM LIQUID-METAL ION-SOURCE

被引：24

作者：

MARRIOTT, P

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 04期

关键词：

D O I：

10.1007/BF00624600

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：329 / 338

页数：10

共 35 条

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