INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES AND THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON ULTRATHIN FILMS

被引：25

作者：

DREVILLON, B

BENFERHAT, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期

关键词：

D O I：

10.1063/1.340408

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5088 / 5091

页数：4

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[1] INSITU INVESTIGATION OF THE EARLY STAGE OF THE GROWTH OF A-SI-H ON SILICA AND TIN DIOXIDE SUBSTRATES
ANTOINE, AM
DREVILLON, B
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 1403 - 1406
[2] INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS
ANTOINE, AM
DREVILLON, B
CABARROCAS, PRI
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) : 2501 - 2508
[3] INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY
ANTOINE, AM
DREVILLON, B
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) : 360 - 367
[4] ANTOINE AM, 1987, MATER RES SOC S P, V77, P381
[5] IR ELLIPSOMETRY STUDY OF ORIENTED MOLECULAR MONOLAYERS
BENFERHAT, R
DREVILLON, B
ROBIN, P
[J]. THIN SOLID FILMS, 1988, 156 (02) : 295 - 305
[6] BENFERHAT R, 1987, THESIS PARIS
[7] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM
CARDONA, M
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02): : 463 - 481
[8] THE NUCLEATION AND GROWTH OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON
COLLINS, RW
PAWLOWSKI, A
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (04) : 1160 - 1166
[9] OXIDATION OF PLASMA-DEPOSITED HYDROGENATED AMORPHOUS-SILICON
DREVILLON, B
VAILLANT, F
[J]. THIN SOLID FILMS, 1985, 124 (3-4) : 217 - 222
[10] HYDROGEN CONTENT OF AMORPHOUS-SILICON FILMS DEPOSITED IN A MULTIPOLE PLASMA
DREVILLON, B
TOULEMONDE, M
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 535 - 540