STRUCTURE AND MORPHOLOGY OF POLYCRYSTALLINE SILICON-SINGLE CRYSTAL SILICON INTERFACES

被引：46

作者：

BRAVMAN, JC ^{[1
]}

PATTON, GL ^{[1
]}

PLUMMER, JD ^{[1
]}

机构：

[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 08期

关键词：

D O I：

10.1063/1.335421

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2779 / 2782

页数：4

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[6]

Patton G. L., 1984, 1984 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No. 84CH2061-0), P54

[7] THE POLY-SINGLE CRYSTALLINE SILICON INTERFACE [J].

WONG, CY ;

MICHEL, AE ;

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