THE POLY-SINGLE CRYSTALLINE SILICON INTERFACE

被引：50

作者：

WONG, CY ^{[1
]}

MICHEL, AE ^{[1
]}

ISAAC, RD ^{[1
]}

KASTL, RH ^{[1
]}

MADER, SR ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333205

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1131 / 1134

页数：4

共 7 条

[1]

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