REDUCTION OF AUTODOPING

被引：15

作者：

BOZLER, CO ^{[1
]}

机构：

[1] SPERRY RAND CORP,GAINESVILLE,FL 32601

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1975年 / 122卷 / 12期

关键词：

D O I：

10.1149/1.2134114

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1705 / 1709

页数：5

共 7 条

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[7] IMPURITY ATOM TRANSFER DURING EPITAXIAL DEPOSITION OF SILICON [J].

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (01) :116-122

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