ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS HYDROGENATED SILICON PREPARED BY REACTIVE ION-BEAM SPUTTERING

被引：8

作者：

SINGH, J

BUDHANI, RC

CHOPRA, KL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期

关键词：

D O I：

10.1063/1.334080

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1097 / 1103

页数：7

共 30 条

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