SPUTTER SECTIONING OF DIFFUSION SPECIMENS

被引：4

作者：

PERKINS, RA ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV MET & CERAMICS,OAK RIDGE,TN 37830

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 05期

关键词：

D O I：

10.1116/1.569084

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1104 / 1107

页数：4

共 19 条

[1]

CANTAGREL M, 1973, J MATER SCI, V8, P1711, DOI 10.1007/BF02403521

[2] INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS [J].

CUOMO, JJ ;

GAMBINO, RJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :79-83

[3] HIGH CRITICAL CURRENT DENSITIES FOUND FOR THICK NB12AL3GE SUPERCONDUCTING DEPOSITS MADE BY HIGH-RATE SPUTTERING [J].

DAHLGREN, SD ;

KROEGER, DM .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (12) :5595-5598

[4] CATHODIC SPUTTERING FOR MICRO-DIFFUSION STUDIES [J].

FISHER, TF ;

WEBER, CE .

JOURNAL OF APPLIED PHYSICS, 1952, 23 (02) :181-183

[5] SELF-DIFFUSION ALONG DISLOCATIONS IN SINGLE-CRYSTAL AU FILMS [J].

GUPTA, D .

PHYSICAL REVIEW B, 1973, 7 (02) :586-594

[6] DIRECT MEASUREMENT OF DIFFUSION AT TEMPERATURES LESS THAN 0.5 TM [J].

GUPTA, D .

THIN SOLID FILMS, 1975, 25 (01) :231-244

[7] A UNIVERSAL MICROSECTIONING TECHNIQUE FOR DIFFUSON [J].

GUPTA, D ;

TSUI, RTC .

APPLIED PHYSICS LETTERS, 1970, 17 (07) :294-&

[8] GRAIN-BOUNDARY SELF-DIFFUSION IN AU BY AR SPUTTERING TECHNIQUE [J].

GUPTA, D .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (10) :4455-4458

[9] GRAIN-BOUNDARY SELF-DIFFUSION IN EVAPORATED AU FILMS AT LOW-TEMPERATURES [J].

GUPTA, D ;

ASAI, KW .

THIN SOLID FILMS, 1974, 22 (01) :121-130

[10] ELECTRICAL AND STRUCTURAL-PROPERTIES OF NICR THIN-FILM RESISTORS REACTIVELY SPUTTERED IN O2 [J].

HARDY, WR ;

MURTI, DK .

THIN SOLID FILMS, 1974, 20 (02) :345-362

← 1 2 →