AMORPHOUS HYDROGENATED SILICON-CARBON-TIN ALLOY-FILMS

被引：7

作者：

DEMICHELIS, F ^{[1
]}

KANIADAKIS, G ^{[1
]}

TAGLIAFERRO, A ^{[1
]}

TRESSO, E ^{[1
]}

RAVA, P ^{[1
]}

机构：

[1] ELETTRORAVA SPA, I-10040 SAVONERA, ITALY

来源：

PHYSICAL REVIEW B | 1988年 / 37卷 / 03期

关键词：

D O I：

10.1103/PhysRevB.37.1231

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1231 / 1235

页数：5

共 26 条

[11] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].

DISCHLER, B ;

BUBENZER, A ;

KOIDL, P .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638

[12] ELECTRICAL, STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON [J].

HAUSER, JJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 23 (01) :21-41

[13] AMORPHOUS-SI1-XSNX-H BY SPUTTER ASSISTED PLASMA CVD [J].

ITOZAKI, H ;

FUJITA, N ;

IGARASHI, T ;

HITOTSUYANAGI, H .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :589-592

[14] PROPERTIES OF AMORPHOUS-SILICON TIN ALLOYS PRODUCED USING THE RADIO-FREQUENCY GLOW-DISCHARGE TECHNIQUE [J].

MAHAN, AH ;

WILLIAMSON, DL ;

MADAN, A .

APPLIED PHYSICS LETTERS, 1984, 44 (02) :220-222

[15] EVIDENCE FOR GRAPHITIC-TYPE BONDING IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS [J].

MAHAN, AH ;

VONROEDERN, B ;

WILLIAMSON, DL ;

MADAN, A .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :2717-2720

[16] ANALYSIS OF FILMS PREPARED BY PLASMA POLYMERIZATION OF ACETYLENE IN A D.C. MAGNETRON [J].

MCKENZIE, DR ;

MCPHEDRAN, RC ;

SAVVIDES, N ;

COCKAYNE, DJH .

THIN SOLID FILMS, 1983, 108 (03) :247-256

[17]

MORIMOTO S, 1982, JPN J APPL PHYS, V21, pL219

[18] CONDUCTION IN NON-CRYSTALLINE SYSTEMS .4. ANDERSON LOCALIZATION IN A DISORDERED LATTICE [J].

MOTT, NF .

PHILOSOPHICAL MAGAZINE, 1970, 22 (175) :7-&

[19] SEMICONDUCTOR PROPERTIES OF AMORPHOUS C-SN THIN-FILMS [J].

MPAWENAYO, P ;

DEMICHELIS, F ;

RAVA, P ;

TAGLIAFERRO, A ;

TRESSO, E ;

KANIADAKIS, G .

THIN SOLID FILMS, 1987, 146 (03) :L19-L22

[20]

PURSONS GN, 1986, J VAC SCI TECHNOL A, V4, P470

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