REACTIVE SPUTTERING OF TITANIUM AND PROPERTIES OF TITANIUM SUBOXIDE FILMS FOR PHOTOCHEMICAL APPLICATIONS

被引：8

作者：

SOLIMAN, AA

SEGUIN, HJJ

机构：

来源：

THIN SOLID FILMS | 1983年 / 100卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90227-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：33 / 42

页数：10

共 14 条

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