CORRELATIONS BETWEEN PLASMA PARAMETERS AND THE DEPOSITION OF MICROCRYSTALLINE SILICON FILMS BY PLASMA OF ARGON AND HYDROGEN

被引：5

作者：

AVNI, R ^{[1
]}

CARMI, U ^{[1
]}

MANORY, R ^{[1
]}

GRILL, A ^{[1
]}

GROSSMAN, E ^{[1
]}

机构：

[1] BEN GURION UNIV NEGEV,DEPT MAT ENGN,IL-84107 BEER SHEVA,ISRAEL

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期

关键词：

D O I：

10.1063/1.339852

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2044 / 2049

页数：6

共 31 条

[1] RADICAL MOLECULE AND ION-MOLECULE MECHANISMS IN THE POLYMERIZATION OF HYDROCARBONS AND CHLOROSILANES IN RF PLASMAS AT LOW-PRESSURES (BELOW 1.0 TORR) [J].

AVNI, R ;

CARMI, U ;

INSPEKTOR, A ;

ROSENTHAL, I .

THIN SOLID FILMS, 1984, 118 (02) :231-241

[2] THE ROLE OF HYDROGEN IN THE RADICAL POLYMERIZATION MECHANISM OF HYDROCARBONS AND CHLOROSILANES IN A LOW-PRESSURE MICROWAVE PLASMA [J].

AVNI, R ;

CARMI, U ;

INSPEKTOR, A ;

ROSENTHAL, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (04) :1813-1820

[3] DISSOCIATION MECHANISM OF CHLOROSILANE TO SILICON IN LOW-PRESSURE MICROWAVE PLASMAS OF ARGON AND ARGON WITH HYDROGEN MIXTURES [J].

AVNI, R ;

CARMI, U ;

ROSENTHAL, I ;

MANORY, R ;

GRILL, A .

THIN SOLID FILMS, 1983, 107 (03) :235-244

[4]

AVNI R, 1983, 6TH P INT S PLASM CH, V2, P522

[5]

BELL AT, 1980, TOPICS CURRENT CHEM, V3, P43

[6] RF PLASMA DEPOSITION OF AMORPHOUS-SILICON FILMS FROM SICL4-H2 [J].

BRUNO, G ;

CAPEZZUTO, P ;

CRAMAROSSA, F ;

DAGOSTINO, R .

THIN SOLID FILMS, 1980, 67 (01) :103-107

[7] REACTIONS OF HE+, NE+, AND AR+ WITH CH4, C2H6, SIH4, AND SI2H6 [J].

CHATHAM, H ;

HILS, D ;

ROBERTSON, R ;

GALLAGHER, AC .

JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (03) :1301-1311

[8] ELECTRON-SPECTROSCOPY STUDY OF SILICON SURFACES EXPOSED TO XEF2 AND THE CHEMISORPTION OF SIF4 ON SILICON [J].

CHUANG, TJ .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) :2614-2619

[9]

Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[10] GLOW DISCHARGE POLYMERIZATION .2. ALPHA-METHYLSTYRENE, OMEGA-METHYLSTYRENE AND ALLYLBENZENE [J].

DENARO, AR ;

OWENS, PA ;

CRAWSHAW, A .

EUROPEAN POLYMER JOURNAL, 1969, 5 (04) :471-&

← 1 2 3 4 →