DEEP-LEVEL SPECTROSCOPY OF REACTIVELY SPUTTERED A-SI-H FILMS

被引：1

作者：

JUNG, AL

LUO, JS

YAO, X

LIN, CH

YANG, YW

ADLER, D

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 57卷 / 02期

关键词：

D O I：

10.1016/0022-3093(83)90057-1

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：241 / 250

页数：10

共 11 条

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