CLUSTERING OF OXYGEN-ATOMS AROUND CARBON IN SILICON

被引：31

作者：

FRAUNDORF, P

FRAUNDORF, GK

SHIMURA, F

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 11期

关键词：

D O I：

10.1063/1.335584

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4049 / 4055

页数：7

共 34 条

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