HIGH-RATE PREPARATION OF AMORPHOUS-SILICON SOLAR-CELLS WITH MONOSILANE

被引：8

作者：

SICHANUGRIST, P ^{[1
]}

SUZUKI, H ^{[1
]}

KONAGAI, M ^{[1
]}

TAKAHASHI, K ^{[1
]}

机构：

[1] SHOWA SHELL OIL CO,CHIYODA KU,TOKYO,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 03期

关键词：

D O I：

10.1143/JJAP.25.440

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：440 / 443

页数：4

共 14 条

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[3]

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[4] A NOVEL STRUCTURE, HIGH CONVERSION EFFICIENCY P-SIC GRADED P-SIC/I-SI/N-SI/METAL SUBSTRATE-TYPE AMORPHOUS-SILICON SOLAR-CELL [J].

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[5] HIGH-PERFORMANCE HYDROGENATED AMORPHOUS SI SOLAR-CELLS WITH GRADED BORON-DOPED INTRINSIC LAYERS PREPARED FROM DISILANE AT HIGH DEPOSITION RATES [J].

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TAKAHASHI, K .

APPLIED PHYSICS LETTERS, 1984, 44 (11) :1092-1094

[6]

NAKANO S, 1984, INT PVSEC 1, P583

[7] HIGH-RATE DEPOSITION OF A-SI - H FILM USING THE DECOMPOSITION OF MONO-SILANE [J].

NAKAYAMA, Y ;

NATSUHARA, T ;

NAGASAWA, N ;

KAWAMURA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (10) :L604-L606

[8]

OHNISHI M, 1984, INT PVSEC 1, P719

[9] VARIABLE MINORITY-CARRIER TRANSPORT MODEL FOR AMORPHOUS-SILICON SOLAR-CELLS [J].

OKAMOTO, H ;

KIDA, H ;

NONOMURA, S ;

HAMAKAWA, Y .

SOLAR CELLS, 1983, 8 (04) :317-336

[10]

SAKAI H, 1984, INT PHOT SCI ENG C 1, P591

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