ADSORPTION AND DESORPTION OF SULFUR ON A GAAS (001) SURFACE BY H2S EXPOSURE AND HEAT-TREATMENT

被引:18
作者
KAWANISHI, H
SUGIMOTO, Y
AKITA, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.585418
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The adsorption and desorption of sulfur on a GaAs (001) surface was studied using in situ Auger electron spectroscopy and reflection high-energy electron diffraction (RHEED). The H2S-treated surface showed a (2 x 1) sulfur-terminated structure, with the sulfur considered to be a few monolayers thick. RHEED patterns showed that the (2 x 1) reconstruction changed into an arsenic-stabilized (2 x 4) structure when heated to 590-degrees-C under an arsenic flux. A sulfur Auger signal on the H2S-treated surface was found to completely disappear upon heating. These data show that H2S exposure is appropriate for preparing a sulfur-terminated surface and that high-quality crystal regrowth is possible on the surface after being heat treated.
引用
收藏
页码:1535 / 1539
页数:5
相关论文
共 23 条
  • [1] THE 1ST STEPS OF THE SULFURIZATION OF III-V COMPOUNDS
    BARBOUTH, N
    BERTHIER, Y
    OUDAR, J
    MOISON, JM
    BENSOUSSAN, M
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : 1663 - 1666
  • [2] COMPARISON OF SURFACE-PROPERTIES OF SODIUM SULFIDE AND AMMONIUM SULFIDE PASSIVATION OF GAAS
    BESSER, RS
    HELMS, CR
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (11) : 4306 - 4310
  • [3] INVESTIGATIONS OF AMMONIUM SULFIDE SURFACE TREATMENTS ON GAAS
    CARPENTER, MS
    MELLOCH, MR
    COWANS, BA
    DARDAS, Z
    DELGASS, WN
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 845 - 850
  • [4] FORMATION OF S-GAAS SURFACE BONDS
    GEIB, KM
    SHIN, J
    WILMSEN, CW
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (04): : 838 - 842
  • [5] HAYASHI I, 1988, EMERGING TECHNOLOGIE
  • [6] REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY ON (NH4)2SX-TREATED GAAS (100) SURFACES
    HIRAYAMA, H
    MATSUMOTO, Y
    OIGAWA, H
    NANNICHI, Y
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (25) : 2565 - 2567
  • [7] KAWANISHI H, 1989, 21ST C SOL STAT DEV, P337
  • [8] ORIENTATION AND TEMPERATURE-DEPENDENCE OF H2S ADSORPTION ON CYLINDRICAL GE AND GAAS SAMPLES
    KUHR, HJ
    RANKE, W
    FINSTER, J
    [J]. SURFACE SCIENCE, 1986, 178 (1-3) : 171 - 178
  • [9] EFFECTS OF H2S ADSORPTION ON SURFACE-PROPERTIES OF GAAS (100) GROWN INSITU BY MBE
    MASSIES, J
    DEZALY, F
    LINH, NT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05): : 1134 - 1140
  • [10] CORRECT SUBSTRATE-TEMPERATURE MONITORING WITH INFRARED OPTICAL-PYROMETER FOR MOLECULAR-BEAM EPITAXY OF III-V SEMICONDUCTORS
    MIZUTANI, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 1671 - 1677