DEPOSITION AND REACTIVE ION ETCHING OF MOLYBDENUM

被引：11

作者：

BENSAOULA, A ^{[1
]}

WOLFE, JC ^{[1
]}

ORO, JA ^{[1
]}

IGNATIEV, A ^{[1
]}

机构：

[1] UNIV HOUSTON,DEPT ELECT ENGN,HOUSTON,TX 77004

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 01期

关键词：

D O I：

10.1063/1.93743

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：122 / 123

页数：2

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