IMPURITY EFFECTS IN NUCLEATION OF ALPHA (BCC)-TANTALUM OR BETA-TANTALUM FILMS

被引：20

作者：

SCHWARTZ, N ^{[1
]}

FEIT, ED ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 01期

关键词：

D O I：

10.1149/1.2133224

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：123 / 131

页数：9

共 26 条

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