X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF THE OXIDE REMOVAL MECHANISM OF GAAS (100) MOLECULAR-BEAM EPITAXIAL SUBSTRATES IN INSITU HEATING

被引：77

作者：

VASQUEZ, RP

LEWIS, BF

GRUNTHANER, FJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 03期

关键词：

D O I：

10.1063/1.93884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：293 / 295

页数：3

共 15 条

[1] MORPHOLOGICAL DEFECTS ARISING DURING MBE GROWTH OF GAAS [J].

BACHRACH, RZ ;

KRUSOR, BS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :756-764

[2] RELAXATION DURING PHOTOEMISSION AND LMM AUGER DECAY IN ARSENIC AND SOME OF ITS COMPOUNDS [J].

BAHL, MK ;

WOODALL, RO ;

WATSON, RL ;

IRGOLIC, KJ .

JOURNAL OF CHEMICAL PHYSICS, 1976, 64 (03) :1210-1218

[3] DEPENDENCE OF RESIDUAL DAMAGE ON TEMPERATURE DURING AR+ SPUTTER CLEANING OF SILICON [J].

BEAN, JC ;

BECKER, GE ;

PETROFF, PM ;

SEIDEL, TE .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :907-913

[4] SURFACE REDUCTION OF SOME CHROMIUM COMPOUNDS DURING X-RAY PHOTOELECTRON-SPECTROSCOPY [J].

DEANGELIS, BA .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 9 (01) :81-84

[5] LOCAL ATOMIC AND ELECTRONIC-STRUCTURE OF OXIDE-GAAS AND SIO2-SI INTERFACES USING HIGH-RESOLUTION XPS [J].

GRUNTHANER, FJ ;

GRUNTHANER, PJ ;

VASQUEZ, RP ;

LEWIS, BF ;

MASERJIAN, J ;

MADHUKAR, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1443-1453

[6] CHEMICAL DEPTH PROFILES OF THE GAAS-NATIVE OXIDE INTERFACE [J].

GRUNTHANER, PJ ;

VASQUEZ, RP ;

GRUNTHANER, FJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05) :1045-1051

[7] COMBINED RHEED-AES STUDY OF THE THERMAL-TREATMENT OF (001) GAAS SURFACE PRIOR TO MBE GROWTH [J].

LAURENCE, G ;

SIMONDET, F ;

SAGET, P .

APPLIED PHYSICS, 1979, 19 (01) :63-70

[8] INSITU CHARACTERIZATION OF MBE GROWN GAAS AND ALXGA1-XAS FILMS USING RHEED, SIMS, AND AES TECHNIQUES [J].

PLOOG, K ;

FISCHER, A .

APPLIED PHYSICS, 1977, 13 (02) :111-121

[9]

PLOOG K, 1980, CRYSTALS GROWTH PROP, V3, P73

[10] HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J].

SCOFIELD, JH .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) :129-137

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