O-18 TRACER STUDY OF THE PASSIVE THERMAL-OXIDATION OF SILICON

被引：28

作者：

CAWLEY, JD

HALLORAN, JW

COOPER, AR

机构：

来源：

OXIDATION OF METALS | 1987年 / 28卷 / 1-2期

关键词：

D O I：

10.1007/BF00666468

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：1 / 16

页数：16

共 24 条

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