STUDY OF MO-IMPLANTED, AU-IMPLANTED, AND NI-IMPLANTED MOLYBDENUM LASER MIRRORS BY MULTIPLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY

被引：7

作者：

SNYDER, PG

ROST, MC

BUABBUD, GH

OH, J

WOOLLAM, JA

POKER, D

ASPNES, DE

INGRAM, D

PRONKO, P

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

[2] BELL COMMUN RES INC,MURRAY HILL,NJ 07974

[3] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.337429

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：779 / 788

页数：10

共 25 条

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