BONDING OF SILICON TO SILICON BY SOLID-PHASE EPITAXY

被引：12

作者：

BHAGAT, JK

HICKS, DB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.337816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3118 / 3120

页数：3

共 12 条

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