PREPARATION OF CA-DOPED YBACUO THIN-FILMS CONTAINING 248 PHASE BY RF MAGNETRON SPUTTERING

被引：7

作者：

KURODA, K ^{[1
]}

KOJIMA, K ^{[1
]}

TANIOKU, M ^{[1
]}

YOKOYAMA, K ^{[1
]}

HAMANAKA, K ^{[1
]}

机构：

[1] MITSUBISHI ELECTR CO, MAT & ELECTR DEVICES LAB, AMAGASAKI, HYOGO 661, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 08期

关键词：

248; phase; Multitargets; Sputtering; Superconductor; Thin films; Ybacuo; Ycabacuo;

D O I：

10.1143/JJAP.29.L1439

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ca-doped YBaCuO thin films containing predominantly a 248 phase were prepared on SrTiO3(100) substrates by sputtering three Ca-doped targets at 500°C and annealing at 750°C. The as-deposited films formed at above 500°C predominantly had a 123 phase, and those at 300°C were amorphous. On the other hand, the as-deposited films obtained at 400-500°C had an unidentified major phase with a lattice spacing of 7 Å, which changed into a 248 phase by annealing, whereas the phase of amorphous films and the 123 phase did not. © 1990 IOP Publishing Ltd.

引用

页码：L1439 / L1442

页数：4

共 10 条

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