EMISSION-SPECTRA OF SIH(A2-DELTA-]X2II) AND SICL2(A1B1-]X1A1) IN THE VUV PHOTOLYSES OF SILANE AND CHLORINATED SILANES

被引:62
作者
WASHIDA, N
MATSUMI, Y
HAYASHI, T
IBUKI, T
HIRAYA, A
SHOBATAKE, K
机构
[1] ULVAC CORP,CHIGASAKI,KANAGAWA 253,JAPAN
[2] KYOTO UNIV,INST CHEM RES,UJI,KYOTO 611,JAPAN
[3] INST MOLEC SCI,OKAZAKI,AICHI 444,JAPAN
关键词
D O I
10.1063/1.449227
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:2769 / 2774
页数:6
相关论文
共 38 条
[11]   IONIC SPECIES IN A SILANE PLASMA [J].
HALLER, I .
APPLIED PHYSICS LETTERS, 1980, 37 (03) :282-284
[12]   The far ultraviolet spectra of methylsilanes [J].
Harada, Y. ;
Murrell, J. N. ;
Sheena, H. H. .
CHEMICAL PHYSICS LETTERS, 1968, 1 (12) :595-596
[13]   SPECTRA + STRUCTURES OF FREE HSICL + HSIBR RADICALS [J].
HERZBERG, G ;
VERMA, RD .
CANADIAN JOURNAL OF PHYSICS, 1964, 42 (03) :395-&
[14]  
HERZBERG G, 1971, SPECTRA STRUCTURES S, P141
[15]  
HIRAYA A, UNPUB
[16]   OBSERVATION OF HSICL IN A CHEMICAL VAPOR-DEPOSITION REACTOR BY LASER-EXCITED FLUORESCENCE [J].
HO, P ;
BREILAND, WG .
APPLIED PHYSICS LETTERS, 1983, 43 (01) :125-126
[17]  
HUBER KP, 1979, MOL SPECTRA MOL STRU, V4, P596
[18]   LASER-INDUCED FLUORESCENCE OF THE SIH2 RADICAL [J].
INOUE, G ;
SUZUKI, M .
CHEMICAL PHYSICS LETTERS, 1984, 105 (06) :641-644
[19]  
INOUE G, UNPUB
[20]   ORIGIN OF EMITTING SPECIES IN THE PLASMA DEPOSITION OF A-SI-H ALLOYS [J].
KAMPAS, FJ ;
GRIFFITH, RW .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1285-1288