CONTAMINATION ANALYSIS OF TIO2 THIN-FILMS DEPOSITED USING ION ASSISTED DEPOSITION

被引:11
作者
ALJUMAILY, GA [1 ]
WILSON, SR [1 ]
BARRON, AC [1 ]
MCNEIL, JR [1 ]
DOYLE, BL [1 ]
机构
[1] SANDIA NATL LABS,DIV ION SOLID INTERACT 1111,ALBUQUERQUE,NM 87185
关键词
D O I
10.1016/0168-583X(85)90492-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:906 / 909
页数:4
相关论文
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