THERMAL DESCRIPTION OF LASER ANNEALING

被引：6

作者：

BAERI, P

机构：

[1] Univ di Catania, Istituto, Dipartimentale di Fisica, Catania,, Italy, Univ di Catania, Istituto Dipartimentale di Fisica, Catania, Italy

来源：

JOURNAL OF LUMINESCENCE | 1985年 / 30卷 / 1-4期

关键词：

AUGER EFFECT - LASER ANNEALING - THERMAL DESCRIPTION;

D O I：

10.1016/0022-2313(85)90069-9

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：409 / 424

页数：16

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Baeri P., 1982, LASER ANNEALING SEMI

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[8] NON-EQUILIBRIUM DOPANTS INCORPORATION IN SILICON MELTED BY LASER-PULSES [J].

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