共 15 条
[2]
Angus J.C., 1986, PLASMA DEPOSITED THI, P89
[5]
TRIBOLOGICAL BEHAVIOR OF AMORPHOUS HYDROGENATED CARBON-FILMS ON SILICON
[J].
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME,
1994, 116 (03)
:454-462
[7]
LEE KR, 1995, MATER RES SOC SYMP P, V356, P779
[8]
LEE KR, UNPUB MATER SCI ENG
[9]
MEUNIER PL, 1989, MATER RES SOC S P, V140, P509