LATERAL COUPLING BETWEEN A SILICON-OXINITRIDE WAVE-GUIDE AND AN AMORPHOUS SI PHOTODIODE

被引：8

作者：

KAPSER, K

DEIMEL, PP

机构：

[1] Messerschmitt-Bölkow-Blohm GmbH, 8000 München 80

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 07期

关键词：

D O I：

10.1063/1.350918

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have measured the absorption coefficient at lambda = 850 nm for an amorphous Si (a-Si:H) p-i-n photodiode laterally coupled to a silicon-oxinitride single mode planar waveguide both for TE and TM modes. The experimental results are compared to calculations considering a five-layer system with a complex index of refraction for the absorbing layer. Theoretical and experimental results agree well considering the inaccuracies in the determination of the layer thicknesses.

引用

收藏

页码：3614 / 3616

页数：3

相关论文

共 14 条

[1]

AMANN MC, 1987, ELECTRON LETT, V23, P896

[2] MULTIMODE PHENOMENA IN SEMICONDUCTOR-CLAD DIELECTRIC OPTICAL WAVE-GUIDE STRUCTURES [J].

CARSON, RF ;

BATCHMAN, TE .

APPLIED OPTICS, 1990, 29 (18) :2769-2780

[3]

CODY GD, 1984, SEMICONDUCT SEMIMET, V21, P11

[4] AMORPHOUS SIGE-H PHOTODETECTORS ON GLASS OPTICAL WAVE-GUIDES [J].

DEIMEL, PP ;

HEIMHOFER, BB ;

KROTZ, G ;

LILIENHOF, HJ ;

WIND, J ;

MULLER, G ;

VOGES, E .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1990, 2 (07) :499-501

[5] IMPEDANCE MATCHING FOR ENHANCED WAVEGUIDE PHOTODETECTOR INTEGRATION [J].

DERI, RJ ;

WADA, O .

APPLIED PHYSICS LETTERS, 1989, 55 (26) :2712-2714

[6] INTEGRATED WAVE-GUIDE PHOTODIODES USING VERTICAL IMPEDANCE MATCHING [J].

DERI, RJ ;

YASUOKA, N ;

MAKIUCHI, M ;

WADA, O ;

KURAMATA, A ;

HAMAGUCHI, H ;

HAWKINS, RJ .

APPLIED PHYSICS LETTERS, 1990, 56 (18) :1737-1739

[7] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J].

FINNE, RM ;

KLEIN, DL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) :965-&

[8] A THIN-FILM WAVE-GUIDE PHOTODETECTOR USING HYDROGENATED AMORPHOUS-SILICON [J].

HOWERTON, MM ;

BATCHMAN, TE .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1988, 6 (12) :1854-1860

[9] 1.3 MU-M MONOLITHICALLY INTEGRATED WAVE-GUIDE-INTERDIGITATED METAL-SEMICONDUCTOR-METAL PHOTODETECTOR ON A GAAS SUBSTRATE [J].

JAGANNATH, C ;

SILLETTI, A ;

CHOUDHURY, ANMM ;

ELMAN, B ;

MELMAN, P .

APPLIED PHYSICS LETTERS, 1990, 56 (19) :1892-1894

[10] ENHANCED POLARIZATION-DEPENDENT COUPLING BETWEEN AN OPTICAL WAVE-GUIDE AND A LATERALLY COUPLED PHOTODETECTOR [J].

KAPSER, K ;

DEIMEL, PP .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :13-16