PICOSECOND PHOTOELECTRON SCANNING ELECTRON-MICROSCOPE FOR NONCONTACT TESTING OF INTEGRATED-CIRCUITS

被引：30

作者：

MAY, P

HALBOUT, JM

CHIU, G

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 02期

关键词：

D O I：

10.1063/1.98596

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：145 / 147

页数：3

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