MONITORING THE DEPOSITION PROCESS OF METAL-DOPED POLYMER-FILMS USING OPTICAL-EMISSION SPECTROSCOPY

被引：30

作者：

MARTINU, L ^{[1
]}

BIEDERMAN, H ^{[1
]}

机构：

[1] CHARLES UNIV,FAC MATH & PHYS,CS-18000 PRAGUE 8,CZECHOSLOVAKIA

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1985年 / 5卷 / 01期

关键词：

D O I：

10.1007/BF00567911

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：81 / 87

页数：7

共 11 条

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[4] METAL DOPED POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION AND THEIR POTENTIAL APPLICATIONS [J].

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VACUUM, 1984, 34 (3-4) :405-410

[5] METAL DOPED FLUOROCARBON POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION USING AN RF PLANAR MAGNETRON TARGET [J].

BIEDERMAN, H ;

HOLLAND, L .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 212 (1-3) :497-503

[6]

DUBEC M, 1984, THESIS MFF UK PRAGUE

[7] OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION [J].

GREENE, JE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (05) :1718-1729

[8] METAL-CONTAINING FLUOROPOLYMER FILMS PRODUCED BY SIMULTANEOUS PLASMA-ETCHING AND POLYMERIZATION - THE SERIES OF PERFLUOROALKANES C1F2(1)+2,C2F2(2)+2,C3F2(3)+2,C4F2(4)+2 [J].

KAY, E ;

DILKS, A .

THIN SOLID FILMS, 1981, 78 (04) :309-318

[9]

MARTINU L, UNPUB VACUUM

[10]

MILLARD MM, 1982, J ELECTROCHEM SOC, V129, P161

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