IRON IMPURITIES IN SI3N4 PROCESSING

被引：8

作者：

BOULDIN, CE ^{[1
]}

STERN, EA ^{[1
]}

DONLEY, MS ^{[1
]}

STOEBE, TG ^{[1
]}

机构：

[1] UNIV WASHINGTON,DEPT MAT SCI & ENGN FB10,SEATTLE,WA 98195

来源：

JOURNAL OF MATERIALS SCIENCE | 1985年 / 20卷 / 05期

关键词：

D O I：

10.1007/BF00555287

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1807 / 1814

页数：8

共 18 条

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[7]

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