INVESTIGATION OF ION-IMPLANTED SEMICONDUCTORS BY ELLIPSOMETRY AND BACKSCATTERING SPECTROMETRY

被引：24

作者：

FRIED, M

LOHNER, T

JAROLI, E

VIZKELETHY, G

MEZEY, G

GYULAI, J

SOMOGYI, M

KERKOW, H

机构：

[1] HUNGARIAN ACAD SCI,TECH PHYS RES INST,H-1325 BUDAPEST,HUNGARY

[2] HUMBOLDT UNIV,BEREICH 06,SEKT PHYS,DDR-1040 BERLIN,GER DEM REP

来源：

THIN SOLID FILMS | 1984年 / 116卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(84)90423-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：191 / 198

页数：8

相关论文

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