SCRATCH ADHESION TEST OF MAGNETRON-SPUTTERED COPPER COATINGS ON ALUMINUM SUBSTRATES - EFFECTS OF THE SURFACE PREPARATION

被引：23

作者：

CAILLER, M ^{[1
]}

LEE, GH ^{[1
]}

机构：

[1] ECOLE NATL SUPE MINES,SCI MAT LAB,F-44072 NANTES 03,FRANCE

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90006-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：193 / 205

页数：13

共 43 条

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[5] ADHESION OF METAL FILMS TO GLASS
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[6] MEASUREMENT OF ADHESION OF THIN FILMS
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[7] STYLUS OR SCRATCH METHOD FOR THIN FILM ADHESION MEASUREMENT - SOME OBSERVATIONS AND COMMENTS
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[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1970, 3 (06) : 877 - &
[8] CAILLER M, 1986, RAPPORT INTERNE
[9] CAILLER M, 1984, VIDE COUCHES MINCES, V220, P55
[10] INVESTIGATION OF MULTILAYER SYSTEMS BY THE SCRATCH METHOD
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[J]. THIN SOLID FILMS, 1983, 109 (02) : 127 - 136

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