FREE-ENERGY MODEL FOR BONDING IN A-SI ALLOYS

被引:29
作者
SMITH, FW
YIN, Z
机构
[1] Department of Physics, City College of New York, New York
关键词
D O I
10.1016/S0022-3093(05)80258-3
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A free energy model (FEM) for predicting the bonding in amorphous covalent alloys has been developed and applied to alloys of a-Si. The bonds favored by chemical ordering (CO) and their relative concentrations have been determined by minimizing the Gibbs free energy of mixing G(M) = H(M) - TS(M) of the alloys, where H(M) and S(M) are the enthalpy and entropy of mixing, respectively. Predictions of the FEM will be given for the a-SiwNx, a-SiwNxHz, a-SiwOyHz, a-SiwNxOyHz, a-SixCy, and a-SixCyHz alloy systems. The bonds favored by CO in these alloys will be identified.
引用
收藏
页码:871 / 874
页数:4
相关论文
共 11 条
[1]   CHARACTERIZATION OF PLASMA-DEPOSITED SILICON DIOXIDE [J].
ADAMS, AC ;
ALEXANDER, FB ;
CAPIO, CD ;
SMITH, TE .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (07) :1545-1551
[2]   OXYGEN IMPURITY STATES IN AN AMORPHOUS-SILICON MATRIX [J].
CHING, WY .
PHYSICAL REVIEW B, 1980, 22 (06) :2816-2822
[3]   CHARACTERIZATION OF PLASMA SILICON-NITRIDE LAYERS [J].
CLAASSEN, WAP ;
VALKENBURG, WGJN ;
HABRAKEN, FHPM ;
TAMMINGA, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (12) :2419-2423
[4]   CHARACTERIZATION OF SILICON-OXYNITRIDE FILMS DEPOSITED BY PLASMA-ENHANCED CVD [J].
CLAASSEN, WAP ;
VANDERPOL, HAJT ;
GOEMANS, AH ;
KUIPER, AET .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (07) :1458-1464
[5]   DIRECT EVIDENCE FOR HOMONUCLEAR BONDS IN AMORPHOUS SIC [J].
GORMAN, M ;
SOLIN, SA .
SOLID STATE COMMUNICATIONS, 1974, 15 (04) :761-765
[6]   OPTICAL DIELECTRIC FUNCTION OF HYDROGENATED AMORPHOUS-SILICON - TETRAHEDRON MODEL AND EXPERIMENTAL RESULTS [J].
MUI, K ;
SMITH, FW .
PHYSICAL REVIEW B, 1988, 38 (15) :10623-10632
[7]   OPTICAL-CONSTANTS OF A SERIES OF AMORPHOUS HYDROGENATED SILICON-CARBON ALLOY-FILMS - DEPENDENCE OF OPTICAL-RESPONSE ON FILM MICROSTRUCTURE AND EVIDENCE FOR HOMOGENEOUS CHEMICAL ORDERING [J].
MUI, K ;
BASA, DK ;
SMITH, FW ;
CORDERMAN, R .
PHYSICAL REVIEW B, 1987, 35 (15) :8089-8102
[8]   NEW DEVELOPMENT IN STUDY OF AMORPHOUS SILICON HYDROGEN ALLOYS - STORY OF O [J].
PAESLER, MA ;
ANDERSON, DA ;
FREEMAN, EC ;
MODDEL, G ;
PAUL, W .
PHYSICAL REVIEW LETTERS, 1978, 41 (21) :1492-1495
[9]   VIBRATIONAL-SPECTRUM OF HYDROGENATED AMORPHOUS SI-C FILMS [J].
WIEDER, H ;
CARDONA, M ;
GUARNIERI, CR .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1979, 92 (01) :99-112
[10]   FREE-ENERGY MODEL FOR BONDING IN AMORPHOUS COVALENT ALLOYS [J].
YIN, Z ;
SMITH, FW .
PHYSICAL REVIEW B, 1991, 43 (05) :4507-4510