USE OF TERTIARYBUTYLARSINE IN THE METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWTH OF GAAS

被引:95
作者
LUM, RM [1 ]
KLINGERT, JK [1 ]
LAMONT, MG [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.98226
中图分类号
O59 [应用物理学];
学科分类号
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页码:284 / 286
页数:3
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