X-RAY-DIFFRACTION RECIPROCAL SPACE MAPPING OF A GAAS SURFACE GRATING

被引：61

作者：

GAILHANOU, M

BAUMBACH, T

MARTI, U

SILVA, PC

REINHART, FK

ILEGEMS, M

机构：

[1] Institut de Micro- et Optoélectronique, Ecole Polytechnique Fédérale de Lausanne

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 14期

关键词：

D O I：

10.1063/1.108606

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A GaAs surface grating (period 574 nm) is analyzed by four crystal-six reflection x-ray diffraction. Two-dimensional measurements in the vicinity of the 004 GaAs reciprocal lattice point show satellites in the transverse direction related to the periodicity of the grating. A cross pattern, centered on the 004 GaAs reciprocal lattice point, is formed by these satellites. An explanation is given by a model which includes the influence of transmission through the surface pattern on the substrate diffraction.

引用

页码：1623 / 1625

页数：3

共 6 条

[1]

BAUMBACH T, UNPUB

[2] A HIGH-RESOLUTION MULTIPLE-CRYSTAL MULTIPLE-REFLECTION DIFFRACTOMETER [J].