HYDROCARBON-OXYGEN MIXTURE AS A RESIST ETCHING GAS WITH HIGHLY ANISOTROPIC ETCHING FEATURE

被引：9

作者：

NAMATSU, H

OZAKI, Y

HIRATA, K

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 02期

关键词：

D O I：

10.1149/1.2119743

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：523 / 525

页数：3

共 8 条

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