OBSERVATION OF CO-DIMER FORMATION DURING THERMAL ANNEALING OF CO-IMPLANTED SI

被引：12

作者：

LANGOUCHE, G

DEPOTTER, M

SCHROYEN, D

机构：

来源：

PHYSICAL REVIEW LETTERS | 1984年 / 53卷 / 14期

关键词：

D O I：

10.1103/PhysRevLett.53.1364

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1364 / 1367

页数：4

共 22 条

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