NOVEL PASSIVATION DIELECTRICS - THE BORON-DOPED OR PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON CARBIDE FILMS

被引：19

作者：

CHANG, CY

FANG, YK

HUANG, CF

WU, BS

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 02期

关键词：

D O I：

10.1149/1.2113855

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：418 / 422

页数：5

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