LASER ANNEALING OF ZNO THIN-FILMS

被引：13

作者：

BERTOLOTTI, M

FERRARI, A

JASKOW, A

PALMA, A

VERONA, E

机构：

[1] UNIV ROMA I,DIPARTIMENTO ELETTR,ROMA,ITALY

[2] LENINGRAD OPT INST,LENINGRAD,USSR

[3] CNR,IST ACUST OM CORBINI,ROME,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 10期

关键词：

D O I：

10.1063/1.333835

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2943 / 2947

页数：5

共 18 条

[1]

ADKI M, 1981, THIN SOLID FILMS, V83, P283

[2] PIEZOELECTRIC ZNO TRANSDUCERS PRODUCED BY R.F. MAGNETRON SPUTTERING [J].

AMBERSLEY, MD ;

PITT, CW .

THIN SOLID FILMS, 1981, 80 (1-3) :183-195

[3] OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS [J].

ARANOVICH, J ;

ORTIZ, A ;

BUBE, RH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04) :994-1003

[4]

BETT RF, 1968, J APPL PHYS, V39, P5215

[5]

CAPORALETTI O, 1982, SOLID STATE COMMUN, V42, P10

[6]

CHUBACHI M, 1974, J APPL PHYS 1 S, V2, P737

[7] SCATTERING LOSS REDUCTION IN ZNO OPTICAL-WAVEGUIDES BY LASER ANNEALING [J].

DUTTA, S ;

JACKSON, HE ;

BOYD, JT ;

HICKERNELL, FS ;

DAVIS, RL .

APPLIED PHYSICS LETTERS, 1981, 39 (03) :206-208

[8] CO2-LASER ANNEALING OF SI3N4, NB2O5, AND TA2O5 THIN-FILM OPTICAL-WAVEGUIDES TO ACHIEVE SCATTERING LOSS REDUCTION [J].

DUTTA, S ;

JACKSON, HE ;

BOYD, JT ;

DAVIS, RL ;

HICKERNELL, FS .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1982, 18 (04) :800-806

[9]

HICKERNELL FS, 1981 IEEE ULTR S P, P489

[10]

HICKERNELL FS, 1980 IEEE ULTR S P, P785

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