PIEZOELECTRIC ZNO TRANSDUCERS PRODUCED BY R.F. MAGNETRON SPUTTERING

被引：20

作者：

AMBERSLEY, MD

PITT, CW

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

D O I：

10.1016/0040-6090(81)90222-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：183 / 195

页数：13

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