COMPENSATION IN N-TYPE GAAS RESULTING FROM NITROGEN ION-IMPLANTATION

被引：28

作者：

DUNCAN, WM

MATTESON, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期

关键词：

D O I：

10.1063/1.334074

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1059 / 1062

页数：4

共 13 条

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