THE SYNTHESIS OF DIAMOND FILMS AT LOWER PRESSURE AND LOWER TEMPERATURE USING MAGNETO-MICROWAVE PLASMA CVD

被引：44

作者：

SUZUKI, JI

KAWARADA, H

MAR, KS

WEI, J

YOKOTA, Y

HIRAKI, A

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 02期

关键词：

D O I：

10.1143/JJAP.28.L281

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L281 / L283

页数：3

共 14 条

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