HYDROGEN DILUTION EFFECTS ON PROPERTIES OF ECR PLASMA DEPOSITED A-GE-H

被引：15

作者：

AOKI, T ^{[1
]}

KATO, S ^{[1
]}

NISHIKAWA, Y ^{[1
]}

HIROSE, M ^{[1
]}

机构：

[1] HIROSHIMA UNIV,DEPT ELECT ENGN,HIROSHIMA 724,JAPAN

来源：

关键词：

D O I：

10.1016/0022-3093(89)90724-2

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：798 / 800

页数：3

共 7 条

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[5] AMORPHOUS GE-XH-1-X BOLOMETERS
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