XPS STUDY OF THE SURFACE-REACTION BETWEEN AU AND AR+ ION TREATED POLYIMIDE

The effect of Ar+ ion treatment of a polyimide surface on its reaction with vapor deposited Au has been investigated. Ion beam treatment was performed on PMDA-ODA samples precured in a N2 furnace and annealed in ultra-high vacuum. Sample surfaces were exposed to doses from 1 × 1012 to 1 × 1016 ions/cm2. Polymer surfaces were treated prior to Au deposition and characterized using x-ray photoelectron spectroscopy (XPS). In addition, Au was deposited on freshly annealed but untreated polymer surfaces, and this interface was then exposed to Ar+ ion treatment. We have found that furnace cured polyimide samples can be used to follow chemical changes, and that low ion dose in the range of 1013 to 1014 ions/cm2 is required for XPS to be effective in monitoring chemical interaction in these systems. It is found that ion treatment enhances chemical interaction between Au and the polymer. © 1990.